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Quantitative Analysis by Energy-Dispersive Spectroscopy

 
This guide covers procedures for quantifying the elemental composition of phases in a microstructure. It includes both methods that use standards as well as standardless methods, and it discusses the precision and accuracy that one can expect from the technique. The guide applies to EDS with a solid-state X-ray detector used on an SEM or EPMA.
Keywords
Chemical Analysis - Chemical Analyzers - Electron Microscopes - Electron Probe Microanalyzers - Energy-Dispersive Spectroscopy - Energy-Dispersive X-Ray Spectroscopy - Quantitative Analysis - Scanning Electron Microscopes - Scanning Electron Microscopy - SEM
ICS CODE
71.040.50 (Physicochemical methods of analysis)
UNSPSC CODE
41111720 (Scanning electron microscopes)
CITATION FORMAT
ASTM E1508-12a, Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy, ASTM International, West Conshohocken, PA, 2012, www.astm.org