This guide covers procedures for quantifying the elemental composition of phases in a microstructure. It includes both methods that use standards as well as standardless methods, and it discusses the precision and accuracy that one can expect from the technique. The guide applies to EDS with a solid-state X-ray detector used on an SEM or EPMA.
KeywordsChemical Analysis - Chemical Analyzers - Electron Microscopes - Electron Probe Microanalyzers - Energy-Dispersive Spectroscopy - Energy-Dispersive X-Ray Spectroscopy - Quantitative Analysis - Scanning Electron Microscopes - Scanning Electron Microscopy - SEM
ICS CODE71.040.50 (Physicochemical methods of analysis)
UNSPSC CODE41111720 (Scanning electron microscopes)
ASTM E1508-12a, Standard Guide for Quantitative Analysis by Energy-Dispersive Spectroscopy, ASTM International, West Conshohocken, PA, 2012, www.astm.org